Terahertz detecting method using multi-reflection optical lever
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Key words:
- Terahertz detector /
- imaging detection /
- bi-material /
- optical lever /
- micro-cantilever
Abstract: Anewmicro-opticalmethodforTerahertzradiationmeasurementwaspresented,whichwas basedonopticalleverandthermalradiationdetection.Abi-materialmicrocantileverwasusedtogenerate micro-deformationcausedbyTerahertzradiantthermaleffect,andthemicro-deformationwasmeasuredby amultiplereflectionopticallevercomposedofapairofplanemirrors.ThenradiationpowerofTerahertz waveswereobtained.Micro-displacementtheoreticalresolutionofthismultiplereflectionopticallever methodcouldbelessthan1nmandameasuringsystemwassetuptoverifyit.Experimentsshowthat theoreticalresolutionofthistestsystemislessthan4nmanditsactualresolutionwaslessthan10nm. DesignsandparametersofaTerahertzdetectorbasedonthismethodweregiven.Thisapproachhadmany advantagessuchasanti-airturbulence,anti-beamcross-talk,andworkingatroomtemperature.Sothisnew methodwassuitableforrealizingminiaturizedTerahertzdetectorswiththefeaturesofuncooled,real-time, low-cost,anditwasalsoappropriateformanufacturingarraydetectorsforimagingdetection.